Might sound stupid, but have you reset your ECU? I cleaned off my MAF recently and had the same surging while at idle afterwards (this was NOT an issue before cleaning MAF) - checked all vacuum lines, checked EGR, AIV, etc. Turns out the problem righted itself when I unplugged the battery for a few minutes and let the ECU reset itself.
Idles perfectly now and I think the A/F ratio is way better as a result as it smells way less of gas. We'll see if mileage improves after I fill up.